1. Application：high quality optical film glass, pc and wafer?etc., 2. Feature：fast pumping rate, good film uniformity, automatic control and protection 3. SPEC： Main power：3phase 220/380v.50/60 hz approx 120-250 a Sus chamber：dia.1100/1400mm x h.1200/1600mm(or customer spec) System control：plc automatic control and protection Vacuum pumps：mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec Thickness monitor：optical or crystal E-beam：5-10 kw on 4x30 cc crucibles Necessary space.weight (approx)： wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg 4. Optional：plasma. Ion source cleaning & assist coating Gas mass flow controller Country of Origin：Taiwan Sales Method：Manufacture Payment Terms：T/T，L/C
1. Application：high quality optical film glass, pc and wafer?etc., 2. Feature：fast pumping rate, good film uniformity, automatic control and protection 3. SPEC： Main power：3phase 220/380v.50/60 hz approx 120-250 a Sus chamber：dia.1100/1400mm x h.1200/1600mm(or customer spec) System control：plc automatic control and protection Vacuum pumps：mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec Thickness monitor：optical or crystal E-beam：5-10 kw on 4x30 cc crucibles Necessary space.weight (approx)： wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg 4. Optional：plasma. Ion source cleaning & assist coating Gas mass flow controller Country of Origin：Taiwan Sales Method：Manufacture Payment Terms：T/T，L/C
