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You are here: Home » Products » Electroplating Equipments » Electron beam/thermal vacuum evaporation coater
Company Name:Chen-I Vacuum Technology Enterprise

Address:No. 198-19, Sec. 2, Nanshan N. Rd., Luzhu Dist., Taoyuan City 338, Taiwan
Zip/Post Code:338



Contact Person:MR.CHEN
Job Title:Business Liaison
E-mail2: jengyih.chen@msa.hinet.net
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Electron beam/thermal vacuum evaporation coater

  • VCO-101-E
1. Application:high quality optical film glass, pc
and wafer?etc.,
2. Feature:fast pumping rate, good film uniformity,
automatic control and protection
3. SPEC:
Main power:3phase 220/380v.50/60 hz approx 120-250 a
Sus chamber:dia.1100/1400mm x h.1200/1600mm(or
customer spec)
System control:plc automatic control and
Vacuum pumps:mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec
Thickness monitor:optical or crystal
E-beam:5-10 kw on 4x30 cc crucibles  
Necessary space.weight (approx):  
wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg
4. Optional:plasma. Ion source cleaning & assist
Gas mass flow controller
Country of Origin:Taiwan
Sales Method:Manufacture
Payment Terms:T/T,L/C

Chen-I Vacuum Technology Enterprise

Variable vacuum equiments as e-beam / thermal /sputtering and lab system...tec., Vacuum coating equipments as multi-layers optical lens(glass / chrome mirror / blue mirror /car light / fog light etc.,) Vacuum coating whole plant equipments vacuum equipments applicaton consulting /service / desing / manufacturing High quality vacuum coating processable article processable articles optical multi-films lens as glasses , chrome mirror , blue mirror , car light and fog light etc.,
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