.Application:high quality oporical film as glass, pc and wafer?..etc., .Feature:automatic conating process & pressure control, fast pumpong rate, good film uniformity,automatic control and protection by plc and computer .SPEC: 1. Main power:3phase 220/380v.50/60 hz approx 120-250a 2. Sus chamber:dia.1100/1400mm x h.1200/1600mm;(or customer spec) 3. System control:computer plc automatic control and protection 4. Vacuum pumps:mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec .Thickness controller:optical or crystal .E-beam:5-10 kw on 4x30 cc crucibles .Necessary space.weight(approx): w x d x h:2800mm x 1500mm x 2400mm,3000-5000kg .Optional:plasma.ion source cleaning & Assist coating .Gas mass flow controller Country of Origin:Taiwan Sales Method:Manufacture Payment Terms:T/T,L/C
.Application:high quality oporical film as glass, pc and wafer?..etc., .Feature:automatic conating process & pressure control, fast pumpong rate, good film uniformity,automatic control and protection by plc and computer .SPEC: 1. Main power:3phase 220/380v.50/60 hz approx 120-250a 2. Sus chamber:dia.1100/1400mm x h.1200/1600mm;(or customer spec) 3. System control:computer plc automatic control and protection 4. Vacuum pumps:mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec .Thickness controller:optical or crystal .E-beam:5-10 kw on 4x30 cc crucibles .Necessary space.weight(approx): w x d x h:2800mm x 1500mm x 2400mm,3000-5000kg .Optional:plasma.ion source cleaning & Assist coating .Gas mass flow controller Country of Origin:Taiwan Sales Method:Manufacture Payment Terms:T/T,L/C